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To explore integrated solar energyharvesting as a power source for low power systems, an array of energyscavenging photodiodes based on a passive-pixel architecture for CMOS imagershas been fabricated together with storage capacitors implemented using on-chipinterconnect in a 0.35- m bulk process. Integrated vertical plate capacitorsenable dense energy storage without limiting optical efficiency. Tests wereconducted with both a white light source and a green laser. Measurementsindicate that 225 W/mm.
The energy density of fullyintegrated storage capacitors is not competitive with system-in-packagesolutions such as ultracapacitors or printable batteries, even with scaling tothe end of the ITRS roadmap. However, for applications with very low energystorage requirements or cost constraints which limit system-
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